METHOD FOR MANUFACTURING BULK SINGLE CRYSTAL OF GALLIUM-CONTAINING NITRIDE

摘要

PROBLEM TO BE SOLVED: To obtain a bulk single crystal of a gallium-containing nitride by using supercritical ammonia. SOLUTION: A supercritical solvent containing an alkaline metal ion is prepared in an autoclave. A feed stock is dissolved in the solvent to prepare a supercritical solution to simultaneously or separately crystallize a gallium-containing nitride on the seed face. The method is carried out by using an autoclave 1 for the production of a supercritical solvent. The autoclave 1 is equipped with a convection controlling apparatus 2. The autoclave is put in a furnace unit 4 equipped with a heating apparatus 5 or a cooling apparatus 6. COPYRIGHT: (C)2004,JPO