| 摘要 |
PROBLEM TO BE SOLVED: To provide a switching element suitable for an optical switch driven by an opticasl beam which is immune to an unrecoverable trouble, is manufactured at a low cost, expandable to a large scale and has a high switching speed, and to provide an optical switch having the switching element. SOLUTION: Electrodes 32 and 34 re formed on the upper face of an insulating base plate 31, wirings 38 and 39 for applying an external electric voltage are connected to the electrodes 32 and 34, respectively, a part excluding the electrode part and the wiring part on the upper face of the insulating base plate 31 is provided with an electrically conductive film 40. A pair of poles 33 are provided on the insulating base plate 31, respective poles 33 have a pair of supporting bars 37 which are elasitically movable. The optical switch is provided with the switching element in which a mirror 36 is turnably supported on the supporting bars 37, and a reflection layer 35 for reflecting light is formed on the light incident face of the mirror 36. COPYRIGHT: (C)2004,JPO |
