| 摘要 |
PROBLEM TO BE SOLVED: To simplify alignment work in measurement of an interference shape, and to enhance precision for shape measurement. SOLUTION: In this alignment method for measuring the interference shape, a concave or convex spherical face shape is used as a tested objective face, and a shape is measured by interference having a reference spherical wave. Returning light from the tested objective face is branched into two, one optical path thereof is used as an optical path for alignment, and an alignment error of the tested objective face is judged based on luminous energy of transmission light by a pinhole located in a position serving as a light convergence point of the returning light on the one optical path, so as to regulate a position and a posture of the tested objective face. COPYRIGHT: (C)2004,JPO
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