| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning tool and a cleaning method capable of preventing an insufficient or excessive cleaning of a probe of a probe card and cleaning the probe quickly. SOLUTION: In the cleaning tool 5 for cleaning the probe 4a of a probe card 4 in a prober, the cleaning tool itself or a polishing surface 5a of the cleaning tool is formed of a conductive polishing material, for example, tungsten carbide, thus simultaneously performing the cleaning work of the probe and contact check work for checking an electrical continuity in the probe by using the cleaning tool 5. COPYRIGHT: (C)2004,JPO
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