| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of moderately inhibiting temperature increase and thermal expansion of a main spindle regardless of a machining state and setting environment of the main spindle, reducing current unbalance of a pair of thrust magnet stators, accurately applying a machining process to workpieces, and restraining declining of machining ability of the main spindle. SOLUTION: This magnetic bearing device is equipped with a machining tool mounting part 1a projecting in a thrust direction from a thrust position target face 1c of the main spindle 1 for mounting a machining tool 8, a reference sensor 5a for detecting the diameter of the main spindle 1 near the thrust position target face 1c of the main spindle 1, a correcting means 17 for a position of the machining tool mounting part correcting thrust control on the basis of the detected information of the reference sensor 5a, and a flow rate computing unit 22 calculating fluid flow rate made to flow in the main spindle 1 based on the detected information of the reference sensor 5a to determine a flow rate command value of a flow rate control device 23. COPYRIGHT: (C)2004,JPO
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