发明名称 Gmr structure and method for the production thereof
摘要 The present invention relates to a method for producing a GMR structure in which a metallic multiple layer (12) is applied onto a carrier (10, 12, 30, 34) and in which the metallic multiple layer (14) is patterned to produce the GMR structure, the carrier (10, 12, 30, 34) having a structure before the metallic multiple layer is applied and the patterning of the metallic multiple layer is performed by CMP. The present invention also relates to a GMR structure having a carrier (10, 12, 30, 34) and a patterned metallic multiple layer positioned on the carrier (10, 12, 30, 34), the patterned metallic multiple layer (14) being situated in one or more depressions (50) of the carrier (10, 12, 30, 34). In addition, the present invention relates to a use of GMR structures.
申请公布号 US2004115922(A1) 申请公布日期 2004.06.17
申请号 US20040470956 申请日期 2004.01.26
申请人 GRUEN DETLEF;FISCHER FRANK;SIEGLE HENRIK;HEIN PETER 发明人 GRUEN DETLEF;FISCHER FRANK;SIEGLE HENRIK;HEIN PETER
分类号 G01D5/18;G01D5/245;G01R33/09;H01L43/08;H01L43/12;(IPC1-7):H01L21/476 主分类号 G01D5/18
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