Grinding pad for wet-chemical grinding of a substrate surface comprises a polymer matrix consisting of polymers with repetition units and incorporating embedded abrasive particles

摘要

The grinding pad (8) for wet-chemical grinding of a substrate surface comprises a polymer matrix consisting of polymers with repetition units and incorporating embedded abrasive particles (9). The water solubility of the polymer matrix lies between 0.03 and 3 g/liter. An Independent claim is also included for a method for wet-chemical grinding of a substrate surface with use of the proposed grinding pad.