| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easily miniaturizable CO2 sensor structure of low humidity dependence capable of film-forming an alkali metal ion conductor by a thick film or thin film process, and a manufacturing method therefor. <P>SOLUTION: A NASICON film 6 of a thick film is formed on an aluminum substrate 4, and a detection electrode comprising a metal electrode 8 and a molten carbonate 10 is connected to a counter electrode comprising a BiMeVO<SB>X</SB>counter electrode film 112 (Me represents multivalent metal element) of an oxygen ion conductor. The CO2 sensor is easily manufactured because the humidity dependence of the CO2 sensor is reduced and because the alkali metal ion conductor is constituted of the NASICON film of the thick film. <P>COPYRIGHT: (C)2004,JPO |
