| 摘要 |
PROBLEM TO BE SOLVED: To offset the influence of an external AC magnetic field and further facilitate adjustment by implementing steady phase adjustment by separating an external AC magnetic field signal into each frequency component, and by carrying out phase adjustment according to respective frequencies even if the frequency component of the external AC magnetic field signal detected by an AC magnetic field detecting section is distributed in a wide range. SOLUTION: This scanning type electronic microscope comprises a correction mechanism having at least two or more pairs of AC magnetic field detecting means, a frequency band amplifying means, a phase adjusting means, an amplitude adjusting means, a synthesizing means, and a means of switching over the scanning direction of the monitor picture. By superposing a correction signal generated by the correction mechanism to an image shift coil which is one of the deflecting means of the scanning type electronic microscope, the disruption of an electron beam caused by the external AC magnetic field is corrected. COPYRIGHT: (C)2004,JPO
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