| 摘要 |
PROBLEM TO BE SOLVED: To provide a microfabrication method of high accuracy and to provide a method for manufacturing a microstructure having high accuracy by applying the microfabrication method. SOLUTION: The microfabrication method includes a step of forming a resin layer for lithography on a substrate, a step of forming a film consisting of a material not transmitting light for exposing on the resin layer and a step of performing exposure through such film, and is characterized in that the film has a prescribed shape pattern. Alternatively, the method for manufacturing the microstructure includes a step of forming the resin layer for lithography on the substrate, a step of forming the film consisting of the material not transmitting light for exposing on the resin layer, a step of performing exposure through such film, a step of forming a resin mold by development, and a step of forming a layer consisting of a metallic material by elctroforming, sputtering or vapor deposition on the resin mold, and is characterized by that the film consisting of the material not transmitting the light for exposing has the prescribed shape pattern. The microstructure obtained by the manufacturing method is suitable for a mold. COPYRIGHT: (C)2004,JPO
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