| 发明名称 |
THIN MEMBRANE TRANSDUCER |
| 摘要 |
A transducer includes a substrate and a thin membrane having a shape that can be deflected relative to the substrate to provide an amount of membrane deflection useful for sensing or actuation purposes. |
| 申请公布号 |
WO2004052046(A2) |
申请公布日期 |
2004.06.17 |
| 申请号 |
WO2003US37707 |
申请日期 |
2003.11.26 |
| 申请人 |
UNIV NORTHWESTERN |
发明人 |
LEE JUNGHOON;CHUNG JAEHYUN;LEE KYONG-HOON |
| 分类号 |
B60C23/02;G01N33/543;H04R7/00 |
主分类号 |
B60C23/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
