| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter inspection device for a liquid crystal display panel for inspecting foreign matter without driving a prober even if the display panel is a liquid crystal display panel having a normally white system. SOLUTION: This foreign matter inspection device has a light source for irradiating light vertically to the liquid crystal display panel from the back side of the display panel, a pair of detectors whose focal positions are aligned with a joint surface of a polarization plate of this display panel or with a liquid crystal part thereof, and an arithmetic processing part for detecting whether foreign matter is included in the display panel, and a plane position as well as a depth position where it is by using information on the intensity of light measured by the detectors. The detectors are disposed in positions from which light irradiated from the light source is not directly seen. Further, a polarization plate is provided on a light receiving part of one detector of the pair of detectors, the polarization plate having the same polarization surface as the polarization plate stuck to a liquid crystal panel to be inspected. COPYRIGHT: (C)2004,JPO
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