发明名称 Microstructure component
摘要 A microstructure component is proposed, in particular an encapsulated micromechanical sensor element, at least one microstructure (18), especially patterned out from a silicon layer (14), being encapsulated by a glass element (51). It is further provided that at least the region of the glass element (51) covering the microstructure (18) is furnished with an electrically conductive coating (50) on its side facing the microstructure (18).
申请公布号 US2004112937(A1) 申请公布日期 2004.06.17
申请号 US20030416140 申请日期 2003.10.08
申请人 LAERMER FRANZ 发明人 LAERMER FRANZ
分类号 G01P15/08;B81B3/00;B81B7/00;H01L29/84;(IPC1-7):B23K1/00 主分类号 G01P15/08
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