| 摘要 |
<P>PROBLEM TO BE SOLVED: To acquire a front image and a side image of an electronic circuit component held by a chucking nozzle by a common image pickup device. <P>SOLUTION: A plurality of chucking nozzles 64 are arranged in a condition that respective axis lines are parallel to a straight line and the axis lines are perpendicular to one circumference about the straight line. A reflector 98 is arranged at a center position of the chucking nozzles 64, and a reflection plane 120 oblique at 45° with respect to the reflector 98 is provided. A reflected light from a side plane of an electronic circuit component 110 held by the chucking nozzle 64 or a light passed laterally through a periphery of the electronic circuit component 110 is directed downward by being reflected by the reflection plane 120, and the reflected light is focused on an image plane of a CCD image sensor of an image 92 by a second lens system 100 and a first lens system 90 to acquire a side image 124. On the other hand, a reflected light by the bottom of the electronic circuit component or a light passed downward through the periphery of the electronic circuit component 110 is focused on the image plane of the CCD image sensor of the image 92 by the first lens system 90 to acquire a front image 126. <P>COPYRIGHT: (C)2004,JPO |
