| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an antireflection film whose hardness is improved by surface treatment of a metal oxide layer which constitutes the uppermost layer of the antireflection film with plasma discharge at a pressure close to the atmospheric pressure after having deposited the metal oxide layer. <P>SOLUTION: The metal oxide layer positioned as the uppermost layer of the antireflection film consisting of a single layer metal oxide layer or two or more metal oxide layers on the substrate is surface-treated with plasma discharge in a mixed gas atmosphere at a pressure close to the atmospheric pressure. <P>COPYRIGHT: (C)2004,JPO |
