| 摘要 |
PROBLEM TO BE SOLVED: To simply eliminate residual charges on a surface of an electrostatic chuck in a short time without being accompanied by heating. SOLUTION: In the charge eliminating method of an electrostatic chuck, after a wafer fixed on the electrostatic chuck is removed, a surface of the electrostatic chuck is irradiated with ultraviolet ray whose main luminescence wavelength is in 150-450 nm wavelength region, and residual potential of the surface of the electrostatic chuck is eliminated. COPYRIGHT: (C)2004,JPO |
