| 摘要 |
PROBLEM TO BE SOLVED: To provide an energy filter device capable of providing an electron beam having a small energy width, and to provide an electron microscope having a small electron beam probe diameter on a sample surface. SOLUTION: When the electron beam is deviated from the center of an opening of a slit, the deviation is accurately corrected based on intensity variation of secondary electrons generated from a sample or the like. The sample is observed by using the electron beam having passed through the opening center of the the slit. Since the influence of aberration of an object lens can be diminished, an electron microscope image having high spatial resolution can be observed. COPYRIGHT: (C)2004,JPO
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