摘要 |
PROBLEM TO BE SOLVED: To provide an alignment layer forming method by which an alignment layer having high reliability can be formed with satisfactory mass productivity, to provide an alignment layer forming device, and to provide a liquid crystal panel, a liquid crystal projector and an electronic device. SOLUTION: In the alignment layer forming method for forming an alignment layer on a substrate 9, sputtering is performed so that sputtering particles discharged from a target 5 are obliquely made incident in the substrate 9 from one direction. Thereby, the alignment layer is formed, consisting of an inorganic material having a plurality of columnar structures wherein crystals grow in an oblique direction to the substrate 9. COPYRIGHT: (C)2004,JPO
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