POROUS FILTERING INSERTS FOR KEEPING OXYGEN-PURGED ATMOSPHERE, AND METHOD AND APPARATUS FOR PELLICLE FRAME WITH REINFORCED BONDING SURFACE

摘要

PURPOSE: A porous filtering inserts, and a method and an apparatus for a pellicle frame with a reinforced bonding surface are provided to transmit an oxygen-sensitive light wavelength without remarkable attenuation in oxygen containing atmosphere by keeping oxygen-purged atmosphere within an optical gap using porous sintered material. CONSTITUTION: A frame(206) includes the first surface with the first opening and the second surface with the second opening. The first and second surfaces are connected with a pellicle(108) and a reticle(104), respectively. At this time, an optical gap(112) is formed between the pellicle and the reticle. A predetermined opening is formed at one edge or more of the frame. The predetermined opening is filled with porous sintered material.