发明名称 AN APPARATUS AND METHOD FOR CLEANING GLASS SUBSTRATES USING A COOL HYDROGEN FLAME
摘要 Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.
申请公布号 WO03043751(A8) 申请公布日期 2004.06.17
申请号 WO2002SG00271 申请日期 2002.11.20
申请人 AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;LIANG, DAVID, TEE;LIM, TUTI, MARIANA;CHEN, SAU, NGEN 发明人 LIANG, DAVID, TEE;LIM, TUTI, MARIANA;CHEN, SAU, NGEN
分类号 B08B3/02;B08B3/08;B08B7/00;C03B29/02;C03C23/00;H01J9/38;H01J17/16;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B08B7/00;C03B32/00;G02F1/133 主分类号 B08B3/02
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