AN APPARATUS AND METHOD FOR CLEANING GLASS SUBSTRATES USING A COOL HYDROGEN FLAME
摘要
Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.
申请公布号
WO03043751(A8)
申请公布日期
2004.06.17
申请号
WO2002SG00271
申请日期
2002.11.20
申请人
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;LIANG, DAVID, TEE;LIM, TUTI, MARIANA;CHEN, SAU, NGEN