| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for continuously, quantitatively and stably producing the vapor of liquid organic matter having high viscosity. SOLUTION: The device for producing organic vapor is provided with a vacuum vessel, a feeding means capable of feeding an organic material into the vacuum vessel, a spraying means for spraying the fed organic material, and a heating board for evaporating the sprayed organic material. The spraying means consists of an intermediate chamber and a spray nozzle, and the intermediate chamber has a solenoid valve periodically capable of opening and closing. COPYRIGHT: (C)2004,JPO
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