| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft landing method of a cluster ion species whereby a cluster can be stably preserved at a relatively high temperature near room temperature and a cluster with a one-dimensional multilayer sandwich structure, such as V<SB>2</SB>Bz<SB>3</SB>, can be deposited without being dissociated. SOLUTION: After a self-structured monomolecular film 13 is formed on a substrate 11, a cluster ion species 14 having been subjected to mass selection is vapor deposited on the substrate 11. The molecular chains 12 of the self-structured monomolecular film 13 absorb the kinetic energy of the cluster ion species 14 by the intramolecular vibration, intermolecular vibration, etc., in the film 13, causing the film to act as a buffer. Thus, the dissociation ratio of a cluster ion species, e.g. V<SB>1</SB>Bz<SB>2</SB>or V<SB>2</SB>Bz<SB>3</SB>, is lowered even when the vapor deposition is conducted at a high rate, enabling the deposition in a high yield. The fixed cluster can be stably preserved at a relatively high temperature near room temperature. COPYRIGHT: (C)2004,JPO
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