发明名称 LABORATORY-ON-CHIP WITH FLOW PASSAGE FORMED OF PHOTOSENSITIVE RESIN, AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To facilitate the formation of a flow passage on a laboratory on a chip, and to allow mass production for the laboratory on the chip. <P>SOLUTION: The first substrate 11 is coated with a photosensitive resin layer 12, as shown in (a). The coated photosensitive resin layer 12 is exposed/developed to form the plurality of fine flow passages 13, as shown in (b). Exposed portions of the first substrate 11 and the photosensitive resin layer 12 are coated with an insulating layer 14. The second substrate 21 has a through hole 22 and an electrode 25, as shown in (c),(d). The second substrate 21 is joined to the photosensitive resin layer 12, as shown in (e). The electrode 25 is faced thereby to the flow passage 13 to impress a voltage to the flow passage 13. The joined substrate is cut longitudinally to serve as an electrophoretic chip 10 having the one flow passage 13. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004170293(A) 申请公布日期 2004.06.17
申请号 JP20020337673 申请日期 2002.11.21
申请人 PENTAX CORP 发明人 MAGUCHI TAKAHIDE;KANEKO AKIHIRO
分类号 G01N27/447;B01D57/02;B03C5/00;B81B1/00;B81C1/00;G01N35/08;G01N37/00;G03F7/26 主分类号 G01N27/447
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