ACOUSTO-OPTICAL ELEMENT FOR ULTRAVIOLET LIGHT AND OPTICAL DRAWING SYSTEM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an acousto-optical element for UV light which does not always require water cooling by realizing an acousto-optical element free of a laser damage and optical damage and an optical drawing system using the same.

SOLUTION: The acousto-optical element includes a high-frequency signal input section (1), a transducer section (2) which transduces a high-frequency signal to a mechanical vibration, and an acousto-optical medium (3) which is changed in optical characteristics by the mechanical vibration. The wavelength of light (7) made incident on the medium (3) is UV light of a wavelength≤380 nm and the medium (3) is an oxide single crystal containing at least boron as a unit cell ingredient of the crystal, an LiNbO3crystal or an LiNbO3crystal doped with MgO.

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