| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electro-optical device which displays images of high quality free of flickers etc. by enhancing light shielding performance to semiconductor layers of TFTs (Thin-Film Transistors). <P>SOLUTION: The electro-optical device is provided with, on a substrate, data lines (6a), scanning lines (3a), pixel electrodes (9a) and TFTs (30) while making a portion of a laminated structure. The substrate is further provided thereon with storage capacitors (70) electrically connected to the TFTs and the pixel electrodes, and shielding layers (400) arranged between the data lines and the pixel electrodes while making a portion of the laminated structure. Grooves (12cv) are formed alongside the TFTs among these and the scanning lines are formed in a manner as to be embedded in the grooves, as a result of which the light incidence from the sides on the semiconductor layers (1a) is suppressed. Also, the lower light shielding film 11a disposed under the TFTs has a two-layered structure of a metal layer (M1) consisting of titanium etc., and a barrier layer (B1), thereby preventing the oxidation of the metal layer and maintaining the light shielding performance of the lower light shielding film. <P>COPYRIGHT: (C)2004,JPO |
