| 摘要 |
PROBLEM TO BE SOLVED: To provide a work transporting table wherein different types of works having different shapes and dimensions is sucked and its structure is simplified by omitting or reducing suction piping to suction ports, and also to provide a work transporter, droplet discharger, electrooptic device, method of manufacturing electrooptic device, and electronic equipment. SOLUTION: The work (substrate) transporting table 3 is provided with a base 36 having a first plate and a second plate bonded to the lower surface of the first plate in an overlapping state, and a plurality of suction ports 332 used for sucking a substrate with negative pressures. In the base 36, suction flow passages 38 are formed to the suction ports 332 by forming grooves on the bonded surface of the first plate. The flow passages 38 are independent in first, second, and third systems 381, 382, and 383. COPYRIGHT: (C)2004,JPO
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