HIGH FREQUENCY HEATING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the breakdown of a high frequency power source in the case that the operation of a matching circuit is insufficient. SOLUTION: The output voltage of the DC power source 160 is controlled so that the output of an incoming power detecting means 170 installed between a high frequency power source 150 and the matching circuit 140 is turned into a specified value or less. Thereby, the overheat of the component of the high frequency power source 150 is prevented and reliability is secured. COPYRIGHT: (C)2004,JPO