| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for supplying fluid which is sent from the fluid source of the fluid supply device 1 and is supplied through a discharge orifice 12 assigned to the supply device 1. SOLUTION: In the method and device for supplying the fluid, before the fluid is supplied through the discharge orifice 12 the fluid, the fluid flows through heat transmission chambers 36∼46 having a large number of communication cavities and comprising a fluid permeable structure through which the fluid flows and, thereby, is heated or cooled. COPYRIGHT: (C)2004,JPO
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