| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor optical waveguide device of which the length from its incidence end to its emission end is small, the curvature loss is small and which is fast, small-sized, and can be integrated. SOLUTION: The semiconductor optical waveguide device is constituted by burying a plurality of nearly S-shaped optical waveguides (1) into a semiconductor substrate (11), interposing and integrally connecting at least two optical waveguide return parts between light incidence and emission ends of the optical waveguides, and forming reflection parts (16a and 16b, and 17a and 17b) on the multiplexing part rear end surface sides of the respective optical waveguide return parts. A chip substrate and the optical waveguides are formed of semiconductor materials, and the optical waveguide return parts are interposed between curved waveguides and connected as a single body, and hence the semiconductor optical waveguide device is made faster and more small-sized, can highly be integrated, and is made inexpensive. COPYRIGHT: (C)2004,JPO |
