| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer light source device capable of providing high luminous efficiency as a whole even when lighting an excimer lamp by intermittently and repeatedly supplying highpass high frequency power with a frequency of≥1MHz. SOLUTION: The excimer light source device is provided with a plurality of excimer lamps, and a lighting electric power unit lighting the excimer lamps by intermittently supplying the high frequency power with the frequency of≥1MHz. It is characterized by that the lighting electric power unit starts the supply of the high frequency power to one excimer lamp while the one excimer lamp is receiving ultraviolet rays from another excimer lamp. COPYRIGHT: (C)2004,JPO
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