| 摘要 |
PROBLEM TO BE SOLVED: To enable defects to be detected for a display substrate without using a polarizing filter of a complex structure or a driving mechanism. SOLUTION: The inspection method includes obtaining information of true defects in the display substrate by means of a first image signal by a first light beam traveling from the display substrate to a photodetector and a second image signal by a second light beam for which the first light beam is passed through a polarizing filter having a polarizing angle different at 90°against a polarizing angle by the display substrate. COPYRIGHT: (C)2004,JPO
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