Identification-code laser marking method and apparatus

摘要

To provide an identification-code laser marking method and apparatus for forming a mark constituted of at least either one dimension or two dimension with time series dots on a substrate by using at least one acoustooptic deflector and thereby scanning at least either a horizontal plane or a vertical plane with a laser beam emitted from a laser oscillator and thereafter irradiating the mark so as to two-dimensionally scan the mark by using a galvanometer scanner.