| 摘要 |
A magnetic sensor (10) includes GMR elements (11-18) and heating coils (21-2 4) as heat generating bodies. Elements (11-14) and elements (15-18) are connect ed by bridge and constitute X-axis and Y-axis magnetic sensor. The heating coil (21) is arranged in the vicinity of the elements (11, 12), the heating coil (22) is arranged in the vicinity of the elements (13, 14), the heating coil (23) is arranged in the vicinity of the elements (15, 16), and the heating coil (24) is arranged in the vicinity of the elements (17, 18). The heating coils (21-24) mainly heat the elements in their vicinities when power is supplied. Accordingly, it is possible to heat and cool the elements within a short period of time during which the earth magnetism can be guaranteed to b e constant. According to the element temperatures before and after heating of the elements and the respective magnetic sensor outputs, the temperature dependency characteristic compensation data (ratio of the sensor output valu e change against the element temperature change) is acquired and according to the data, the element temperature characteristic is compensated. |
