| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact whose volume resistivity at a room temperature is 1.0×10<SP>13</SP>Ωcm or less, and to provide an electrostatic chuck obtained by using the same. <P>SOLUTION: A dense aluminum nitride sintered compact composed by adding Si of 0.3 to 5% expressed in terms of oxide, and at least one kind selected from alkaline earth metals and rare earth elements of 1 to 10% in total expressed in terms of oxide is obtained. The aluminum nitride sintered compact is used as a dielectric layer adsorbing the body to be adsorbed, and voltage is applied to an electrode provided therebelow, so that the body to be adsorbed is adsorbed. <P>COPYRIGHT: (C)2004,JPO |
