| 摘要 |
PROBLEM TO BE SOLVED: To reduce thermal deformation of an installation surface due to aging effect in heating, to keep flatness of a heating object high, and to reduce a manufacturing cost while imparting strength tolerable for support to a heater, in a heating device for installing the heating object to heat. SOLUTION: This heating device 1 is provided with: a ceramic substrate 2 having the installation surface 2a for installing the heating object W, a back surface 2b and side surfaces 2c; a heating means 3 for generating heat from the installation surface 2a of the ceramic substrate 2; and a metallic plate-like support member 4 for supporting the ceramic substrate 2 from the back surface 2b. COPYRIGHT: (C)2004,JPO
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