| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-like connector in which electrode structures provided with surface electrode sections having small diameters, high projecting heights/diameters, and high dimensional accuracy can be formed with high positional accuracy and with which an electrically connected stable state can be obtained even to electrodes arranged in short pitches, and to provide a method of manufacturing the connector and a probe device. SOLUTION: The sheet-like connector has an insulating sheet 11 and a plurality of electrode structures 15 which are arranged on the sheet 11 separately from each other in the facial direction, and each of which is constituted by connecting a projecting surface electrode 16 and a rear electrode to each other through a short-circuiting section. The insulating sheet 11 is composed of a material in which through holes can be formed by etching. The short-circuiting sections are formed by packing a metal in the through holes formed in the sheet 11 by etching. The surface electrodes 16 are formed by packing a metal in the patterned holes of a resist film formed on the surface of the insulating sheet 11. COPYRIGHT: (C)2004,JPO
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