| 摘要 |
PROBLEM TO BE SOLVED: To enable a laminated film, which is composed of a low-resistance core metal film sandwiched between an upper high-melting point metal film and a lower high-melting point metal film, to be improved in heat-resistant and corrosion-resistant properties at the same time. SOLUTION: A low-resistance interconnecting line of laminated structure is composed of low-resistance core metal films 72 and 82 sandwiched between lower high-melting point metal films 71 and 81 and upper high-melting point metal films 74 and 84. The top surfaces, under surfaces and side walls of the low-resistance core metal films are thin coated with the oxide film, nitride film, or oxide nitride films 73 and 83 of the low-resistance core metal. In this case, the oxide film, nitride film, or oxide nitride films 73 and 83 of the low-resistance core metal covering the top surfaces, under surfaces and side walls of the low-resistance core metal films may be set different from each other. COPYRIGHT: (C)2004,JPO
|
