METHOD FOR FINESSE COMPENSATION IN FABRY-PEROT DEVICE AND FABRY-PEROT DEVICE WITH HIGH FINESSE

摘要

PROBLEM TO BE SOLVED: To provide a method for the finesse compensation of a Fabry-Perot device that can secure precision of movement and a tilt of a reflector in orthogonal comb-shaped structure, avoid curvature of a mirror surface, and maintain flatness by controlling the reflector with an independent voltage. SOLUTION: The method for the finesse compensation of the Fabry-Perot device includes the steps of: arranging a plurality of 1st actuation elements 22 orthogonally around a 1st reflector 21; electrically connecting the plurality of 1st actuation elements to a plurality of independent driving voltages; and slanting the 1st reflector to a 2nd reflector with two rotation degrees of freedom by driving the plurality of 1st actuation elements by controlling the independent driving voltages. COPYRIGHT: (C)2004,JPO