| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe, which can surely and easily establish Kelvin connection on an electrode surface, even if an object to be measured becomes minute, and which can accurately and easily perform four-terminal measurement, even if it is on-board. SOLUTION: A contactor is formed of stacked thin plates having a spring properties, in which abutment parts on the object to be measured are inclined so that the inclination parts cross, and it is constituted so that the thin plate inclination parts to the crossing point are deformed independently and elastically, when it abuts on the object to be measured so as to be capable of elastically abutting on the object to be measured. COPYRIGHT: (C)2004,JPO
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