| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for organic vapor coating by which organic vapor to be produced can stably be coated onto an object such as a base material, the vapor of liquid organic matter having high viscosity can continuously, quantitatively and stably be produced, and the vapor can be coated onto the object. SOLUTION: This apparatus is provided with a vacuum vessel, a feeding means capable of feeding an organic material to the vacuum vessel, a spraying means for spraying the organic material fed into the vacuum vessel and a heating board for evaporating the sprayed organic material, and a coating chamber for coating the evaporated organic material to the vacuum vessel is connected thereto. In the apparatus, the connected part is provided with a flow rate controller and a valve capable of opening and closing. COPYRIGHT: (C)2004,JPO
|
