METHOD FOR MANUFACTURING NITROGEN TRIFLUORIDE

摘要

PROBLEM TO BE SOLVED: To provide an efficient method for manufacturing nitrogen trifluoride (NF3). SOLUTION: The method of manufacturing nitrogen trifluoride from a fluorine reactant and an ammonium ion source which are dispersed in a liquid phase reaction mixture containing one or more perfluorocarbon fluid is provided. In one embodiment, the fluorine reactant is introduced into the reaction mixture at 90-120°C. In this embodiment, the yield of nitrogen trifluoride is about 80% or greater. COPYRIGHT: (C)2004,JPO