发明名称 DEVICE AND METHOD FOR THE EVAPORATIVE DEPOSITION OF A HIGH-TEMPERATURE SUPERCONDUCTOR IN A VACUUM WITH CONTINUOUS MATERIAL INTRODUCTION
摘要 The invention firstly relates to a device for the evaporative deposition of a high-temperature superconductor on a substrate in a vacuum, comprising a refilling device for housing a reservoir of high-temperature superconducting material, an evaporation device, which evaporates the high-temperature superconducting material in an evaporation zone, by means of a beam of an energy-transfer medium, a supply device for the continuous supply of the high-temperature superconducting material from the refilling device to the evaporation zone in such a manner that the high-temperature superconducting material supplied to the evaporation zone is evaporated essentially without residue. The invention further relates to a method for the evaporative deposition of a coating of a high-temperature superconducting material on a substrate in a vacuum, comprising the steps of the continuous introduction of a granulate of a high-temperature superconducting material into an evaporation zone and the operation of a beam of an energy transfer medium, such that the introduced granulate is evaporated in the evaporation zone essentially without a residue.
申请公布号 WO2004041985(A3) 申请公布日期 2004.06.17
申请号 WO2003EP11428 申请日期 2003.10.15
申请人 THEVA DUENNSCHICHTTECHNIK GMBH;KINDER, HELMUT 发明人 KINDER, HELMUT
分类号 C23C14/00;C23C14/08;C23C14/24;C23C14/28;C23C14/30 主分类号 C23C14/00
代理机构 代理人
主权项
地址