MANUFACTURING DEVICE OF ORGANIC EL DEVICE, MANUFACTURING METHOD OF ORGANIC EL DEVICE, ORGANIC EL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To restrain occurrence of defects such as pinholes due to powder dust arising from a manufacturing process of an organic EL device or powder dust brought inside the manufacturing device by a base body, and to provide a manufacturing device and method of the organic EL device with excellent luminous characteristics and with elongated life, an organic EL device and an electronic equipment. SOLUTION: The manufacturing device for manufacturing the organic EL device has the base body 2 arranged in treatment rooms 84, 85 and forms the organic EL element or an electrode layer on the bqase body. A dust-collecting part 50 for collecting the powder dust inside the treatment rooms is provided. COPYRIGHT: (C)2004,JPO