| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact probe for which the maintenance for removing attached impurities among the plural contact points is reduced, since the contact point moves on a surface to be inspected and removes the impurities from the surface under pressure, so that a proper contact resistance can be obtained permanently, and no reduction is made to occur in the degree of integration, when many probes for an inspection are arranged. SOLUTION: When there is no pressure applied, a plunger 1c has the plural pointed ends having an acute angle extended in a shape of a broom, then the plunger contacts with the surface to be inspected 1d, so a pressure is added to the plunger, and the plunger is mounted within a barrel 1b and becomes narrower. When pressurization is completed 2, the plunger becomes a probe having a contact point 2a of a conical shape. As a result, without reducing the degree of integration of many probes for inspection, a stable contact resistance is established permanently, and the maintenance required for removing the attached impurities is reduced. COPYRIGHT: (C)2004,JPO
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