SURFACE TREATMENT METHOD FOR TEST SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a sample surface treating method useful for observation of high performance intrinsic to a transmission electron microscope. SOLUTION: Both the surface and a reverse face of the sample 16 are exposed under plasma atmosphere to conduct plasma surface treatment, using a vacuum surface treatment device provided with an electrode 2 for mounting a sample holder 6 equipped with a silicon substrate 17 deposited with the sample for the transmission electron microscope pretreated preliminarily by FIB working or the like, in a vacuum chamber having Ar gas introducing ports 8, 9, and provided with an electrode 3 provided in a position opposed thereto. Halogen gases such as CF4and O2other than Ar gas can be used as active species gas for generating a plasma. Molybdenum, iron silicide or the like other than silicon can be used as a material for the substrate 17. COPYRIGHT: (C)2004,JPO