Method for producing thin film sensors, especially hot film anemometters and humidity sensors

摘要

A method for producing thin film sensors that includes applying a sensor structure to a front of a glass substrate so as to define a combination, connecting a support on a front of the combination. The method further includes removing a portion of the glass substrate over a large surface from a direction directed from a back of the combination down to a final thickness (d) of the glass substrate and releasing a connection between the support and the combination.