MANUFACTURING APPARATUS OF SILICON PHOTOVOLTAIC ELEMENT, THE SILICON PHOTOVOLTAIC ELEMENT, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing a silicon photovoltaic element which can manufacture a film at a low temperature and which can improve a photoelectric conversion efficiency by suppressing the mixture of a phosphorus in a crystalline i-type layer.

SOLUTION: The apparatus for manufacturing the silicon photovoltaic element includes a discharging electrode 14, and a substrate 1 disposed oppositely to the electrode 14, thereby manufacturing a crystalline silicon layer on the substrate 1. The apparatus further includes a film forming surface heater 16 having a heating element with air permeability between the substrate 1 and the electrode 14. The method for manufacturing the silicon photovoltaic element uses the apparatus for manufacturing the element described above.

COPYRIGHT: (C)2004,JPO