| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of stably measuring data related to a sample for a long time. SOLUTION: A light detecting device 6 detects the light from a measurement point on the sample 9, and a statistical analyzing device 7 statistically analyzes the detected light intensity value, and a data processing device 8 outputs a measurement point moving command for moving the measurement point on the basis of the light intensity value, and a measurement point moving device 3 moves the measurement point on the sample 9 on the basis of the measurement point moving command. COPYRIGHT: (C)2004,JPO
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