| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding head structure of simple configuration capable of hindering dust from stagnating between the print wiring surface of a semiconductor board and a sticky film for protecting the print wiring surface. SOLUTION: The grinding head 50 is equipped at its oversurface with a central recess 60 and with grooves 61 to serve as a flow passage arranged radially toward the outside from the central recess, and a water supply guide 59 having a plurality of slopes 62 and 63 with the gradient becoming lesser gradually toward the outside is fixed to the lower part of a hollow shaft 57 through a ring-shaped flange 56 fixed to the lower periphery of the hollow shaft 57, and a metal base 53 of a cup wheel type whetstone is fixed to the ring-shaped flange through a ring projection 55, and a cup-shaped lid is formed from the bottom wall, the ring projection, and the flange so as to prevent the grinding liquid from leaking out from the over-part when the hollow shaft rotates. The grinding liquid supplied to the inside of the hollow shaft is introduced to inside the peripheral wall via the surface of the water supply guide and is fed by pressure to the surface to be processed where any work and a whetstone piece 54 are in slide contact by the centrifugal force generated by rotation of the water supply guide 59. COPYRIGHT: (C)2004,JPO
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