MICROMACHINE AND METHOD OF PRODUCING THE SAME

摘要

A micromachine for a high frequency filter having a high Q factor and a frequency band which is high. A micromachine (1) comprising an output electrode (7) disposed on a board(5), an interlayer insulation film (9) covering the board (5) and having a hole pattern (9a) with an output electrode (7) used as a bottom, and a band-like vibrator electrode (11) disposed on the interlayer insulation film (9) in such a manner that, with the interior of the hole pattern (9a) used as a space (A), it crosses the upper region thereof, the micromachine being characterized in that the vibrator electrode (11) is formed as a recess on the hole pattern (9a) side along the side wall of hole pattern (9a).